Provision of a 300mm Capable High Throughput Electron Beam Lithography System

Award

Value

£7,461,509

Suppliers

Classifications

  • Laboratory, optical and precision equipments (excl. glasses)

Tags

  • award
  • contract

Published

1 year ago

Description

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

Documents

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  • Contract Agreement

    The official contract terms, conditions, and scopes of work.

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  • Award Notice

    Details on the tender award and selected suppliers.

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