Provision of a 300mm Capable High Throughput Electron Beam Lithography System
Buyers
Value
£7,461,509
Suppliers
Classifications
- Laboratory, optical and precision equipments (excl. glasses)
Tags
- award
- contract
Published
1 year ago
Description
The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.
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